By Ulrich Daiminger, Waldemar Lind
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Still conflicting results are sometimes found in different laboratories. The geometry of the deposition system determines to a large extent whether hydrogen dilution is beneficial or not. In systems where the interelectrode distance d is relatively large, the product of process pressure p and this distance d, the pd product, would become large. A large pd product makes the plasma operate in the 'Y regime which stimulates dust formation and yields non-uniform films. In these systems hydrogen dilution is beneficial.